第一次学这个,谁能教教我
作业要求;1.解释语句的意思2.增加语句,能画出每一步的仿真图
go athena
#TITLE: Poly Buffered LOCOS Example
#
line x loc=-1.5 spac=0.1
line x loc=-0.4 spac=0.02
line x loc=0.0 spac=0.02
line x loc=0.7 spac=0.2
#
line y loc=0
line y loc=0.2 spac=0.08
line y loc=1
initialize orient=100
oxide ori.dep=f
#
# Pad oxide and nitride mask
deposit oxide thick=0.02 div=1
deposit poly thick=0.1 div=4
deposit nitride thick=0.15 div=3
etch nitride left p1.x=-0.4
#
tonyplot
#
# Field oxidation
method fermi compress
diffuse time=120 temp=1000 weto2
#
structure outfile=anoxex05.str
#
tonyplot anoxex05.str
quit