go athena#TITLE: Poly Buffered LOCOS Example#line x loc=-1.5 spac=0.1 line x loc=-0.4 spac=0.02line x loc=0.0 spac=0.02 line x loc=0.7 spac=0.2#line y loc=0 line y loc=0.2 spac=0.08line y loc=1 initialize orient=100oxide ori.dep=f## Pad oxide and nitride maskdeposit oxide thick=0.02 div=1deposit poly thick=0.1 div=4deposit nitride thick=0.15 div=3etch nitride left p1.x=-0.4#tonyplot ## Field oxidationmethod fermi compress diffuse time=120 temp=1000 weto2#structure outfile=anoxex05.str#tonyplot anoxex05.strquit第一次学这个,谁能教教我作业要求;1.解释语句的意思2.增加语句,能画出每一步的仿真图